Digital Twin (DT) technology has gained traction in a variety of industries and is now in its initial stages of adoption within the semiconductor industry. DTs enable electronics manufacturers to virtually represent a process step, a tool, full manufacturing processes, operations, and even complete supply chains, and can be used to improve designs, develop new processes, predict performance, improve operational efficiency, or for direct optimization.

A DT is essentially a virtual representation of the physical world. Early DT models were relatively simple empirical models, and as a concept were practiced by NASA during the space program [1]. Newer approaches & models incorporating real-time synchronized data are becoming increasingly more capable, which in turn facilitates more useful and real-time real-world applications and benefits. As semiconductor manufacturing processes become more complex, and with increased development risk and durations, there is a growing need for accurate, predictive, interoperable, and integrative DTs to help guide the development of new products into high volume.